The cleanliness of clean rooms is often affected by airflow. In other words, the movement, diffusion, etc. of dust generated by people, machine compartments, building structures, etc. are governed by airflow. From the principle of purification, the clean room uses HEPA and ULPA to filter the air. The dust collection rate is as much as 99.97~99.99995%. Therefore, the air filtered by this filter can be said to be very clean, and the cleanliness level is 1-100 million. between. However, in addition to people in the clean room, there are still objective factors for generating dust sources such as the machine and the production of raw materials. Once the dust generated is spread, the clean space cannot be maintained. Therefore, the dust generated by the airflow must be quickly discharged to the outside.

The airflow in the clean room is an important factor in the performance of the clean room. Generally, the airflow speed of the clean room is selected between 0.25 and 0.5 m/s. This airflow is a breeze area and is easily interfered by the movement of people and machines. It tends to be chaotic, although increasing the wind speed can suppress the influence of this disturbance and maintain the cleanliness, but the increase of the wind speed will affect the increase of the running cost, so the most appropriate wind speed should be achieved when the required cleanliness level is met. Supply to achieve the appropriate wind speed supply to achieve

Economic effect.

On the other hand, in order to achieve the stability of clean room cleanliness, the maintenance of uniform airflow is also an important factor. If the uniform airflow cannot be maintained, it means that the wind speed is different, especially on the wall surface, and the airflow will vortex on the wall surface. Achieving high cleanliness is actually very difficult.


In the vertical laminar flow direction of the clean room, it is necessary to maintain a uniform airflow: (a) the wind speed of the blown surface cannot be different in speed; (b) the wind speed of the suction surface of the floor return air plate cannot have a difference in speed. If the speed is too low or too high (0.2m/s, 0.7m/s), there will be eddy current phenomenon, and at 0.5m/s, the airflow will be more uniform. At present, the general clean room has a wind speed of 0.25~0.5. m/s


There are many factors affecting the airflow in the clean room, such as process equipment, personnel, clean room assembly materials, lighting fixtures, etc., and the diversion point of the airflow above the production equipment should also be considered. Therefore, it is necessary to clean the air shower passage before the dust source may flow.

The airflow diversion point on the surface of the general operation console or production equipment should be set at 2/3 of the distance between the clean room space and the partition wall. This allows the airflow from the inside of the process area to the work area when the operator is working. If the diversion point is placed in front of the process area, it will become an improper airflow diversion. At this time, most of the airflow will flow to the process area, and the dust caused by the operator's operation will be brought to the back of the equipment. The station will therefore be polluted and the yield will be reduced.

Obstructions such as work tables in the clean room will have eddy currents at the junction, and the cleanliness will be relatively poor in the vicinity. The return air holes on the work table will minimize the eddy current phenomenon. Whether the choice of assembly materials is appropriate and whether the equipment is perfect is also an important factor in whether the airflow becomes a vortex phenomenon.

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